Generolo Jono Žemaičio Lietuvos karo akademija logo


  • List of journals
  • About Publisher
Login Register

  1. Home
  2. Journals
  3. cndcgs
  4. Issues
  5. Volume 2020, Issue 1 (2020)
  6. Laser Photolithography of Graphene Oxide

Challenges to national defence in contemporary geopolitical situation

Information
  • Article info
  • More
    Article info

Laser Photolithography of Graphene Oxide
Volume 2020, Issue 1 (2020), pp. 111–113
Barbara NASIłOWSKA   Magdalena NAURECKA   Zdzisław BOGDANOWICZ   Zygmunt MIERCZYK  

Authors

 
Placeholder
https://doi.org/10.47459/cndcgs.2020.14
Pub. online: 16 October 2020      Type: Article      Open accessOpen Access

Published
16 October 2020

Abstract

The paper presents the results of research on the effect of laser photolithography on graphene oxide (GO) fixed on the silicon wafer and PVC plate (polyvinyl chloride). Before fixing the graphene oxide, the surface was treated with plasma cleaning in the argon atmosphere. Then deposition with AZ4533 photoresist and laser photolithography were carried out. Analysis of the spectral characteristics and structural tests proved that graphene oxide was not damaged during exposing to a laser beam. The laser photolithography process was followed with observation of typical FTIR-ATR bonds originating from COOH, C=O and C-O-C typical for GO. The pattern (on the GO + AZ4533 coating) was exposed to the laser beam (GaN) and revealed by a developing agent. That was a base for continuation of further research with a purpose of ion etching.

PDF XML
PDF XML

Copyright
No copyright data available.

Keywords
photolithography grapheme oxide wafer silicon PVC

Metrics
since October 2020
584

Article info
views

0

Full article
views

273

PDF
downloads

192

XML
downloads

Export citation

Copy and paste formatted citation
Placeholder

Download citation in file


Share


RSS

Generolo Jono Žemaičio Lietuvos karo akademija Šilo g. 5A., LT-10322 Vilnius, el.p: lka@mil.lt

General Jonas Žemaitis Military Academy of Lithuania  Šilo Str. 5A, LT-10322 Vilnius, Lithuania, e-mail: lka@mil.lt

Powered by PubliMill  •  Privacy policy